Single-crystal atomic layer deposited Y<inf>2</inf>O<inf>3</inf> on GaAs(0 0 1) - Growth, structural, and electrical characterization

Wu, S.Y.S.Y.WuChen, K.H.K.H.ChenLin, Y.H.Y.H.LinCheng, C.K.C.K.ChengHsu, C.H.C.H.HsuKwo, J.J.KwoMINGHWEI HONG2019-12-272019-12-272015https://scholars.lib.ntu.edu.tw/handle/123456789/443320[SDGs]SDG7Single-crystal atomic layer deposited Y<inf>2</inf>O<inf>3</inf> on GaAs(0 0 1) - Growth, structural, and electrical characterizationjournal article10.1016/j.mee.2015.04.0612-s2.0-84929167786https://www.scopus.com/inward/record.uri?eid=2-s2.0-84929167786&doi=10.1016%2fj.mee.2015.04.061&partnerID=40&md5=1e23a693bb1f68959599170061103088