Negussie A.T.Diyatmika W.Chu J.P.Shen Y.L.Jang J.S.C.Hsueh C.H.CHUN-HWAY HSUEH2019-09-252019-09-25201409258388https://scholars.lib.ntu.edu.tw/handle/123456789/425049The shape recovery property of a sputtered Zr50.3Cu 28.1Al14Ni7.6 (in at.%) thin film metallic glass upon heating is examined. Due to the surface tension-driven viscous flow, the shape of indentation appears to recover to different extents at various temperatures and holding times. It is found that a maximum of 59.8% indentation depth recovery is achieved after annealing within the supercooled liquid region (SCLR). The amount of free volume in the film is found to play a role in the recovery. Atomic force microscopy results reveal a decrease in film roughness to a minimum value within SCLR. To elucidate the experimentally observed shape recovery, a numerical modeling has been employed. It is evident that the depressed region caused by indentation is elevated after annealing. ? 2014 Elsevier B.V. All rights reserved.AnnealingIndentation depth recoveryRoughnessThin film metallic glassjournal article10.1016/j.jallcom.2014.06.0482-s2.0-84903717288https://www2.scopus.com/inward/record.uri?eid=2-s2.0-84903717288&doi=10.1016%2fj.jallcom.2014.06.048&partnerID=40&md5=770cc7795946a3642b603512c579b818