臺灣大學: 光電工程學研究所蘇國棟朱崇豪Chu, Chung-HaoChung-HaoChu2013-03-272018-07-052013-03-272018-07-052011http://ntur.lib.ntu.edu.tw//handle/246246/253556隨著紅外線熱影像的發展，愈來愈多應用逐漸由軍事應用轉移到商業應用如工業監測、車用夜視、遠距醫療照護等。在紅外線熱影像儀中，紅外線光學系統、感測焦平面以及信號處理電路都是被廣泛研究的對象。而其中感測焦平面更是非常重要的元件。焦平面一般而言分為致冷式與非致冷式，其中非致冷式因為有體積較小、成本較低的優點，且在效能表現上也漸漸能夠符合一般商業應用的緣故，因此我們將發展重點鎖定在此種類型的紅外線感測元件上。在非致冷型紅外線感測器中，熱阻式感測是一很重要的分支。由於熱阻式感測器藉由溫度改變造成的電阻改變來得到外界的熱影像訊號，因此其上的感測薄膜必須擁有高電阻溫度係數，才能在微小的溫度變化中得到較大的訊號。在這篇論文中，我們研究了一種新的感測材料-細胞色素c，並且由測量其電阻對溫度的變化，証明此薄膜擁有高電阻溫度係數。我們並且提出了一種新的結構，由SU8正光阻所構成，模擬其作為感測器能有的靈敏度。我們希望這個方法能提供一個低成本的紅外線熱影像儀的解決方案。With the development of thermal imaging, more and more applications are mentioned not in military, but also commercial such as industry monitoring, automobile nightvision, far distance medicine care etc. In infrared thermal imaging, infrared optics system, sensing focal plane arrays and signal processing circuit are intensively researched. The sensing focal plane is very important one. Generally, focal plane arrays are classified as cooled and uncooled. Due to the advantages of low cost and small volume, and the performance is afford to generally commercial applications, we focus on uncooled infrared sensing focal plane array. In all type of uncooled infrared technique, microbolometer is an important one. The microbolometer generates the signals with the resistance changed by temperature difference, hence, the thin film sensing material needs high temperature coefficient of resistance to get larger signal from small temperature difference. In this thesis, we investigated a new sensing material – cytochrome c. By measuring the resistance varies with temperature, we proved the high temperature coefficient of resistance of thin film. And we proposed a new structure composed by SU8 and simulated the responsivity of it. We hoped this method provides a solution for low cost thermal imaging system.1491822 bytesapplication/pdfen-US非致冷紅外線感測器熱影像高溫度電阻係數細胞色素c薄膜Uncooled Infrared DetectorThermal ImageHigh Temperature Coefficient of ResistanceCytochrome c thin filmthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/253556/1/ntu-100-R98941023-1.pdf