Electron-beam lithography assisted patterning of surfactant-templated mesoporous thin films

Wu, C.-W.C.-W.WuAoki, T.T.AokiKuwabara, M.M.KuwabaraKEVIN CHIA-WEN WU2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-11144292053&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/307677Electron-beam lithography assisted patterning of surfactant-templated mesoporous thin filmsjournal article10.1088/0957-4484/15/12/035