The relaxation of stress and reduction of KOZ by the special designed trench structure near the TSV for the application of 3-DICs

M. H.LiaoM.-Y. YuG.-H. LiuC.-H. ChenC.-X. Hong2019-03-112019-03-112013https://scholars.lib.ntu.edu.tw/handle/123456789/404570The relaxation of stress and reduction of KOZ by the special designed trench structure near the TSV for the application of 3-DICsconference proceedings