Cheng, Y.Y.ChengShew, B.-Y.B.-Y.ShewChyu, M.K.M.K.ChyuChen, P.H.P.H.ChenPING-HEI CHEN2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0346981694&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/292632[SDGs]SDG9Ultra-deep LIGA process and its applicationsjournal article10.1016/S0168-9002(01)00606-4