A Linear-Response CMOS-MEMS Capacitive Tactile Sensor

C.-T. SunY.-C. LinC.-J. HsiehJ.-C. LiouL.-B. WangWEI-CHENG TIAN2018-09-102018-09-102012-10http://scholars.lib.ntu.edu.tw/handle/123456789/374200A Linear-Response CMOS-MEMS Capacitive Tactile Sensorconference paper10.1109/ICSENS.2012.64115452-s2.0-84873972640