Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication

JYH-HORNG CHENLI-CHEN FULin, M.-H.M.-H.LinHuang, A.-C.A.-C.Huang2020-06-112020-06-112001https://scholars.lib.ntu.edu.tw/handle/123456789/501177Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabricationjournal article10.1109/70.9646632-s2.0-0035485508https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035485508&doi=10.1109%2f70.964663&partnerID=40&md5=72bb0abbd56221a3009ca70e144a2989