Hung, Shao-KangShao-KangHungHwu, En-TeEn-TeHwuChen, Mei-YungMei-YungChenLI-CHEN FU2009-02-252018-07-062009-02-252018-07-06200710834435http://ntur.lib.ntu.edu.tw//handle/246246/141125https://www.scopus.com/inward/record.uri?eid=2-s2.0-34347375514&doi=10.1109%2fTMECH.2007.897264&partnerID=40&md5=e02dbefec8bf592d4a9cbbf7bf8c7243This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry. © 2007 IEEE.application/pdf381313 bytesapplication/pdfen-USAdaptive control; Interferometry; Modulation; Nanopositioning; Optical fiber[SDGs]SDG7Adaptive control systems; Modulation; Optical fibers; Piezoelectric actuators; Proportional control systems; Dual-stage piezoelectric nano-positioner; High-order harmonic information; Fabry-Perot interferometersjournal article10.1109/TMECH.2007.8972642-s2.0-34347375514http://ntur.lib.ntu.edu.tw/bitstream/246246/141125/1/36.pdf