Resonant-wavelength tuning of microring filters by oxygen plasma treatment

Wang, Tzyy-JiannTzyy-JiannWangHuang, Yen-HaoYen-HaoHuangChen, Hsuen-LiHsuen-LiChen2008-12-312018-06-282008-12-312018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/95620https://www.scopus.com/inward/record.uri?eid=2-s2.0-14844367101&doi=10.1109%2fLPT.2004.840921&partnerID=40&md5=b5f87dc75ff5225b90aa78fb1f240386application/pdf173120 bytesapplication/pdfen-USResonant-wavelength tuning of microring filters by oxygen plasma treatmentjournal article10.1109/LPT.2004.8409212-s2.0-14844367101http://ntur.lib.ntu.edu.tw/bitstream/246246/95620/1/21.pdf