Sidewall smoothing of Si/SiO2 waveguide by excimer laser reformation

Hung, S.-C.S.-C.HungLiang, E.-Z.E.-Z.LiangCHING-FUH LIN2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-47849105699&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332073Sidewall smoothing of Si/SiO2 waveguide by excimer laser reformationconference paper10.1109/INOW.2007.4302958