Chen-Yu LiaoHsi-Hui LinWei-Hsin CheinLIANG-CHIA CHEN2025-05-152025-05-152024-12-05https://www.scopus.com/record/display.uri?eid=2-s2.0-85219549033&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/729325This study proposes a compact displacement measurement interferometer facilitated by a novel dynamic current-wavelength modulation method for high-precision displacement measurement. This technique compensates for the modulation depth by precisely predicting the optical path difference with frequency-scanning interferometry to achieve consistent modulation depth over an extensive measurement range. Additionally, a wavelength-locking method was developed for the 1550 nm band, using the P7 absorption peak of hydrogen cyanide gas to lock the central wavelength of the laser. The experimental results showed that the wavelength stability can be kept within 128 fm for 8 h with the proposed method. Furthermore, the deviations are less than 40 nm compared to a calibrated laser interferometer within the 300 mm measurement range. This research offers precise positioning feedback for precision engineering, paving the way for advanced semiconductor manufacturing processes.displacement measurement interferometer (DMI)dynamic current-wavelength modulationfrequency-scanning interferometry (FSI)HCN gaswavelength-locking[SDGs]SDG7[SDGs]SDG9journal article10.1088/1361-6501/ad96d2