Microstructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealing

Huang C.M.Wang S.F.Peng C.J.Shieh J.Chang C.S.Lin T.S.TZONG-LIN JAY SHIEH2019-11-272019-11-27200609215107https://www.scopus.com/inward/record.uri?eid=2-s2.0-33747863271&doi=10.1016%2fj.mseb.2006.06.033&partnerID=40&md5=88d94c35b8f5cba305741978dccb5a4dhttps://scholars.lib.ntu.edu.tw/handle/123456789/433273Microstructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealingjournal article10.1016/j.mseb.2006.06.0332-s2.0-33747863271