2005-11-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/693815摘要：傳統的製程排氣系統設計方法由於無法考慮到系統實際運轉情形，所以往往採用過大之設計而需選用較大之設備，因此需於系統完工後，藉由調整系統的閥件或擋板開啟角度而達到系統壓力與流量的平衡，而此風量平衡步驟不但耗費了許多人力時間外，也造成運轉成本的增加。此外；傳統的設計方法也無法針對廠房擴廠時，所需增加之機台以及相關管段、配件或設備等，得到與原系統相容的設計。有鑑於此，本文將引入回饋模擬法針對製程排氣系統進行分析，以瞭解系統實際運轉情形，進而得到系統運轉時最佳操作與控制策略。本文將以回饋模擬法，針對TFT-LCD 廠酸性氣體製程排氣系統進行模擬，並針對擋板控制與風機變頻控制兩種不同控制策略進行分析，最後並針對擴廠時系統運轉情形進行模擬，讓設計者於設計階段即可瞭解系統的運轉情形，進而提高設計的彈性，並縮短設計時程。<br> Abstract: Conventional exhaust duct system design methods utilize the maximum load to choose equipment and ignore the actual running process. In actual running process, exhaust duct system needs to meet the flow-rate requirements by adjusting the damper angles or the fan speeds. In addition conventional design methods fail to take into account future development and expansion of the exhaust duct system. In order to remove the disadvantages of conventional designs, feedback simulation method is proposed to simulate the actual running process. An acid gas exhaust system in a TFT-LCD factory is presented in this study. It demonstrates that the new duct simulation method contains a simple computation procedure and takes into account the balancing adjustment. The proposed design not only shortens the design timeframe and prevents human calculation errors, but also reduces the dependence on designer experience.回饋模擬法製程排氣系統變頻節能Feedback Simulation MethodExhaust Duct SystemVariable Speed Energy Saving回饋模擬法應用於製程排氣系統平衡調整之研究