Selective growth of platinum nanolines by helium ion beam induced deposition and atomic layer deposition

Yang, P.-S.P.-S.YangHuang, Z.-D.Z.-D.HuangHuang, K.-W.K.-W.HuangChen, M.-J.M.-J.ChenMIIN-JANG CHEN2021-02-042021-02-042020https://www.scopus.com/inward/record.url?eid=2-s2.0-85079073101&partnerID=40&md5=376b039827e87cbe38a158c325e0c575https://scholars.lib.ntu.edu.tw/handle/123456789/546710Selective growth of platinum nanolines by helium ion beam induced deposition and atomic layer depositionjournal article10.1016/j.ultramic.2020.112952320447082-s2.0-85079073101WOS:000522150300009