Reflective autofocus image system with mems deformable mirror and freeform design

Chang, W.-L.W.-L.ChangLin, M.-H.M.-H.LinGUO-DUNG JOHN SU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-80054849867&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/364839Reflective autofocus image system with mems deformable mirror and freeform designconference paper10.1117/12.893145