JUI-CHE TSAIChiou, Sheng-jieSheng-jieChiouHsieh, Tien-liangTien-liangHsiehSun, Chia-WeiChia-WeiSunHah, DooyoungDooyoungHahWu, Ming C.Ming C.Wu2009-03-252018-07-062009-03-252018-07-06200814644258http://ntur.lib.ntu.edu.tw//handle/246246/147822https://www.scopus.com/inward/record.uri?eid=2-s2.0-43049127480&doi=10.1088%2f1464-4258%2f10%2f4%2f044006&partnerID=40&md5=31dd3993780ffa66f2c0e22755957344We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained. © IOP Publishing Ltd.application/pdf1508625 bytesapplication/pdfen-USRadial combdrive actuators; Small form factor; Surface micromachining; Two-axis scannerjournal article10.1088/1464-4258/10/4/0440062-s2.0-43049127480http://ntur.lib.ntu.edu.tw/bitstream/246246/147822/1/08.pdf