Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering

Chien, S. C.S. C.ChienChattopadhyay, S.S.ChattopadhyayChen, L. C.L. C.ChenLin, S. T.S. T.LinChen, K. H.K. H.ChenSHIANG-TAI LIN2020-01-062020-01-0620030925-9635https://scholars.lib.ntu.edu.tw/handle/123456789/445760Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputteringjournal article10.1016/S0925-9635(03)00175-4WOS:000185308900004