國立臺灣大學電機工程學系暨研究所王維新2006-07-252018-07-062006-07-252018-07-062000-07-31http://ntur.lib.ntu.edu.tw//handle/246246/7779本計畫旨在研究利用鋅鎳擴散 式鈮酸鋰光波導，來製作高訊熄比之 光極化分離器。我們以鋅、鎳兩種金 屬做為擴散源，製作出任意方向極化 光的波導。藉由改變不同的製程參數 （如鋅與鎳的厚度，擴散的溫度與時 間）可得到單導TE、單導TM 極化 光的波導。利用單極化光波導，我們 設計並製作出具有高訊熄比的極化 分離器。此計畫使用鋅鎳擴散式鈮酸 鋰波導做為TE 分支，並且利用質子 交換式波導做為TM 分支，在Y 型 分叉結構中，TM 與TE 極化光將會 分別選取不同的分支；TM極化光將 會導向質子交換式波導，TE 極化光 則會導向鋅鎳擴散式波導。藉由單導 TE 極化光的使用，可增加其訊熄 比，並且適當地設計其分叉角度，使 得元件的尺寸縮小，可增加其積體化 的密度。本項設計係利用或延續本實 驗室以往之研究成果，對於國內光電 元件設計與製造技術之發展，將有極 大助益。The purpose of this work is to study the fabrication of high-extinction-ratio optical polarization splitter by using zinc and nickel diffused(ZnNi:)LiNbO3 Optical waveguides. We fabricated randomly polarized waveguides using zinc and nickel as diffusants. By different fabrication parameters e.g. thicknesses of zinc and nickel, diffusion temperature and time, we made single-TE and single-TM polarized waveguides. We proposed a polarization splitter of high extinction ratio by single-polarization waveguides. This work used zinc and nickel diffused LiNbO3 as TE arm and annealed proton-exchange(APE) LiNbO3 as TM arm. In the Y-branch structure, TE and TM polarization waves see TE and TM arms, respectively. TM-polarized wave propagates toward APE-LiNbO3, and TE-polarized wave propagates toward ZnNi:LiNbO3. Using the single-TE polarized wave, extinction ratio has been increased successfully., and we can design an adequate branching angle making the polarization splitter smaller in order to have a higher density of integration. The work of this project is expected to be useful for the local industry in the design and fabrication of lithium niobate integrated optical waveguide devices.application/pdf337486 bytesapplication/pdfzh-TW國立臺灣大學電機工程學系暨研究所鈮酸鋰鋅鎳質子交換Ｙ型分叉光波導Lithium NiobateZincNickelAnnealed Proton ExchangeY-branch Waveguidereporthttp://ntur.lib.ntu.edu.tw/bitstream/246246/7779/1/892215E002007.pdf