Fabrication of optical waveguide devices using gas-assisted UV micro/nanoimprinting with soft mold

Weng, Y.-J.Y.-J.WengWeng, Y.-C.Y.-C.WengYang, S.-Y.S.-Y.YangLON A. WANG2020-06-042020-06-042007https://scholars.lib.ntu.edu.tw/handle/123456789/497260Fabrication of optical waveguide devices using gas-assisted UV micro/nanoimprinting with soft moldjournal article10.1002/pat.9212-s2.0-36349032788https://www.scopus.com/inward/record.uri?eid=2-s2.0-36349032788&doi=10.1002%2fpat.921&partnerID=40&md5=1541bbf25bd4598a6adddbe8f84767cf