Kim, B.B.KimLin, Y.Y.LinHuang, W.-L.W.-L.HuangAkgul, M.M.AkgulLi, W.-C.W.-C.LiRen, Z.Z.RenNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282009https://scholars.lib.ntu.edu.tw/handle/123456789/486414Micromechanical resonant displacement gain stagesconference paper10.1109/MEMSYS.2009.48053082-s2.0-65949084957https://www.scopus.com/inward/record.uri?eid=2-s2.0-65949084957&doi=10.1109%2fMEMSYS.2009.4805308&partnerID=40&md5=5133f6fd22037cd8788f7fb91e339264