Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration

Shigetou, A.A.ShigetouYang, T.H.T.H.YangC. ROBERT KAO2021-02-042021-02-042019https://www.scopus.com/inward/record.url?eid=2-s2.0-85084113427&partnerID=40&md5=7cae8cd28088d0bd10d27f46c4b9841bhttps://scholars.lib.ntu.edu.tw/handle/123456789/546628Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integrationconference paper10.1109/3DIC48104.2019.90587862-s2.0-85084113427