Low-stress organic membrane for high-resolution variable optical attenuator

Li, C.-H.C.-H.LiChiu, C.-W.E.C.-W.E.ChiuChen, T.-Y.T.-Y.ChenGUO-DUNG JOHN SU2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-84899099094&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/331974Low-stress organic membrane for high-resolution variable optical attenuatorconference paper