Chen, Hou-JenHou-JenChenYang, Kai-ChiangKai-ChiangYangLin, Pi-ChenPi-ChenLinLin, KaifanKaifanLinMIIN-JANG CHENWang, Chen-ChieChen-ChieWangChiu, ChunChunChiuHSIN-CHIH LIN2025-08-142025-08-142025-11-0102540584https://www.scopus.com/record/display.uri?eid=2-s2.0-105010697674&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/731380In this study, plasma-enhanced atomic layer deposition (PEALD) was used to coat biodegradable magnesium-calcium (Mg–Ca) alloys with Al2O3 and ZrO2 multilayer films to enhance their corrosion resistance and biocompatibility. To evaluate the trend of multilayer stacking, single-, double-, and four-layer coatings were prepared with a constant total thickness of ∼20 nm, allowing for direct comparison of layer structure effects on corrosion resistance and mechanical performance. The results showed that the four-layer 2×(Al2O3/ZrO2) films significantly improved corrosion resistance, reducing the corrosion current from 1.63 × 10−5 A/cm2 in bare Mg–Ca samples to 1.85 × 10−7 A/cm2. These films also exhibited the highest crack resistance and superior mechanical properties compared to the single-layer films. Based on these results, the total film thickness was increased to 1000 cycles to evaluate the biocompatibility further. MG63 osteoblast culture experiments demonstrated that multilayer Al2O3/ZrO2 films promoted significantly better cell adhesion and proliferation compared to single-layer Al2O3 films. These findings highlight the potential of PEALD multilayer Al2O3/ZrO2 coatings for enhancing both corrosion protection and biocompatibility of Mg–Ca alloys, underscoring their suitability for orthopedic implant applications.falseAtomic layer depositionCorrosion protectionElectrochemical testMagnesium-calcium alloyMultilayerjournal article10.1016/j.matchemphys.2025.1312972-s2.0-105010697674