Chen, Ting YiTing YiChenTsai, Chun PuChun PuTsaiWEI-CHANG LI2023-04-072023-04-072023-01-01978166549308610846999https://scholars.lib.ntu.edu.tw/handle/123456789/630040This work demonstrates a CMOS-MEMS resonant thermometer with a temperature coefficient of frequency (TCF) as high as 59.2× compared to that of a regular resonator-based counterpart using frequency combs in an internal resonating (IR) beam resonator. Particularly, the time-varying amplitude modulated resonance signal due to energy exchange between the 1st and 3rd flexural modes in the IR resonator yields combs in the frequency domain. The comb generation occurs within a certain frequency range, and the comb spacing exhibits a certain dependency on the offset from the onset IR. By driving the resonator at a fixed frequency around its 1st mode, the offset changes and therefore the comb spacing changes in response to temperature changes, yielding a TCF up to -11,481 ppm/°C in the comb spacing shift, a 59.2× higher against the -194 ppm/°C of the resonance frequency of a reference beam resonator. The results verify the IR induced frequency combs can serve as a promising approach towards ultrasensitive sensors.CMOS-MEMS | Frequency combs | internal resonance | temperature sensorsconference paper10.1109/MEMS49605.2023.100523612-s2.0-85149862418https://api.elsevier.com/content/abstract/scopus_id/85149862418