Shen J.-C.Jywe W.-Y.Chiang H.-K.Shu Y.-L.Wen-Yuh Jywe2022-05-242022-05-242008https://www.scopus.com/inward/record.uri?eid=2-s2.0-39049119825&doi=10.1016%2fj.precisioneng.2007.04.002&partnerID=40&md5=4022c31f80d673d30e0caaae103d01f0https://scholars.lib.ntu.edu.tw/handle/123456789/611956In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, a modified Prandtl-Ishlinskii (MPI) model is used to model the hysteresis nonlinearity. Then, the inverse MPI model is used to reduce the hysteresis nonlinearity, and a sliding-mode controller is used to compensate for the remaining nonlinear uncertainty and disturbances. In general, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. When the linear model is identified, it is used to design the sliding-mode controller. Finally, this design method is applied to the motion control of a nano-stage, and experimental results are presented to verify the usefulness of this method. ? 2007 Elsevier Inc. All rights reserved.Control nonlinearitiesElectronic circuit trackingEngineeringHysteresisMathematical modelsMotion controlSliding mode controlUncertainty analysisModified Prandtl Ishlinskii (MPI) modelsNanopositioningTracking controlPiezoelectric actuators[SDGs]SDG7journal article10.1016/j.precisioneng.2007.04.0022-s2.0-39049119825