A Systematic Study of the Initial Electrical and Radiation Hardness Properties of Reoxidized Nitrided Oxides by Rapid Thermal Processing

JENN-GWO HWU2018-09-102018-09-101995http://www.scopus.com/inward/record.url?eid=2-s2.0-4243099022&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/314479A Systematic Study of the Initial Electrical and Radiation Hardness Properties of Reoxidized Nitrided Oxides by Rapid Thermal Processingjournal article10.1109/23.387357