Feng &amp, Z.C.Z.C.Feng &ampLiu, H.D.H.D.Liu2010-09-022018-07-052010-09-022018-07-051983-01http://ntur.lib.ntu.edu.tw//handle/246246/193752en-USCurvature Radius and layer stresses for thermal strain in semiconductor multilayer structuresjournal article