Effects of main gas and carrier gas on ZnO thin films deposited by atmosphere pressure plasma jet

JIA-YANG JUANGHSIN-TIEN LINTung-Sheng ChouKUO-LONG PANChih-Chiang Weng2021-10-072021-10-072014https://scholars.lib.ntu.edu.tw/handle/123456789/584143Platanias-Chania, Crete, GreeceEffects of main gas and carrier gas on ZnO thin films deposited by atmosphere pressure plasma jetconference paper