Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Yugma, C.C.YugmaBlue, J.J.BlueDauz?re-P?r?s, S.S.Dauz?re-P?r?sObeid, A.A.ObeidJAKEY BLUE2020-03-022020-03-022015https://scholars.lib.ntu.edu.tw/handle/123456789/467308Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlookjournal article10.1007/s10951-014-0381-12-s2.0-84924221289https://www.scopus.com/inward/record.uri?eid=2-s2.0-84924221289&doi=10.1007%2fs10951-014-0381-1&partnerID=40&md5=f5aee0884d15f4ccb01f990f5c9d7e91