Convex corner induced capacitance-voltage response from depletion to deep depletion in non-planar substrate metal-oxide-semiconductor capacitors with ultra thin oxide

Tseng, P.-H.P.-H.TsengHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84896395485&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/385268Convex corner induced capacitance-voltage response from depletion to deep depletion in non-planar substrate metal-oxide-semiconductor capacitors with ultra thin oxidejournal article10.1016/j.tsf.2014.01.088