Huang, Yi HsuanYi HsuanHuangZheng, Hong SenHong SenZhengTsai, Chun PuChun PuTsaiWEI-CHANG LI2023-04-072023-04-072023-01-01978166549308610846999https://scholars.lib.ntu.edu.tw/handle/123456789/630043This work demonstrates a micromechanical received signal strength indicator (RSSI) circuits based on CMOS-MEMS folded-beam comb-drive tapping-mode resonators. In particular, the tapping bandwidth of vibro-impact resonators that exhibits a linear growth as a function of input signal level when the dominant contact force transits from the attractive to repulsive force is used as RSSIs for ultra-low power indoor positioning reader applications. Based on CMOS-MEMS folded-beam comb-drive resonators, two designs are presented specifically for this purpose: (1) applying gap-narrowing technique to improve sensitivity, and (2) double-sided stoppers with different gap spacing to create digitized bandwidth vs. input signal strength for event-oriented positioning. These techniques would help to solve the power consumption and decoding problems of previous indoor localization method.CMOS-MEMS | indoor positioning | received signal strength indicator | vibro-impact resonators[SDGs]SDG11conference paper10.1109/MEMS49605.2023.100521692-s2.0-85149824108https://api.elsevier.com/content/abstract/scopus_id/85149824108