An automatic optical-simulation-based lithography hotspot fix flow for post-route optimization

Tong, Y.-S.Y.-S.TongLin, C.-W.C.-W.LinSAO-JIE CHEN2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-70349152627&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350240An automatic optical-simulation-based lithography hotspot fix flow for post-route optimizationconference paper10.1145/1514932.1514959