Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy

MAO-HSIUNG CHIANG2012-10-312018-06-282012-10-312018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/244460en-USDevelopment of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracyjournal article10.3390/s1004026752-s2.0-77951748849http://ntur.lib.ntu.edu.tw/bitstream/246246/244460/-1/96.pdf