Fabrication of diffractive optical lens for beam splitting using LIGA process

Yang, J.J.J.J.YangLiao, Y.S.Y.S.LiaoChen, C.F.C.F.ChenYUNN-SHIUAN LIAO2020-01-132020-01-132006https://scholars.lib.ntu.edu.tw/handle/123456789/448661Fabrication of diffractive optical lens for beam splitting using LIGA processconference paper10.1109/ICMA.2006.2578042-s2.0-34247198306https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247198306&doi=10.1109%2fICMA.2006.257804&partnerID=40&md5=ee969deebc908d477b143b40d78061f0