An alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrive

Liao, Y.S.Y.S.LiaoChyuan, S.W.S.W.ChyuanChen, J.T.J.T.ChenLiaoYS2008-11-262018-06-282008-11-262018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/86991application/pdf718009 bytesapplication/pdfen-USAn alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrivejournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86991/1/33.pdf