Lin Y.-S.Kuo C.-Y.Tian W.-C.Wu T.-H.Sheen H.-JKuo H.-Y.WEI-CHENG TIAN2019-06-122019-06-1220139.78E+12https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891722237&doi=10.1109%2fTransducers.2013.6627195&partnerID=40&md5=2859c3a2f48702330d3cbaa5bbc5aa52https://scholars.lib.ntu.edu.tw/handle/123456789/410995Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reactionconference paper10.1109/Transducers.2013.66271952-s2.0-84891722237