Fabrication of sub-micrometer Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system

Hung, S.-C.S.-C.HungShiu, S.-C.S.-C.ShiuChao, C.-H.C.-H.ChaoCHING-FUH LIN2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-54049144765&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340842Fabrication of sub-micrometer Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation systemconference paper10.1109/OMEMS.2008.4607860