Maikap, S.S.MaikapTzeng, P.-J.P.-J.TzengWang, T.-Y.T.-Y.WangLin, C.H.C.H.LinLee, L.S.L.S.LeeYang, J.-R.J.-R.YangTsai, M.-J.M.-J.TsaiJER-REN YANG2020-05-122020-05-122008https://scholars.lib.ntu.edu.tw/handle/123456789/491622[SDGs]SDG7Memory characteristics of atomic-layer-deposited high- �e HfAlO nanocrystal capacitorsjournal article10.1149/1.28397622-s2.0-39349093151https://www.scopus.com/inward/record.uri?eid=2-s2.0-39349093151&doi=10.1149%2f1.2839762&partnerID=40&md5=a089c4124dbe8f3faab7415b9923adcc