A multiple degress of freedom electrothermal actuator for a versatile MEMS gripper

Chen, D.-S.D.-S.ChenYin, C.-Y.C.-Y.YinLai, R.-J.R.-J.LaiTsai, J.-C.J.-C.TsaiJUI-CHE TSAI2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-65949113842&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350112[SDGs]SDG16A multiple degress of freedom electrothermal actuator for a versatile MEMS gripperconference paper10.1109/MEMSYS.2009.4805563