Liu C.-K.Yu C.-K.Chien H.-C.Kuo S.-L.Hsu C.-Y.Dai M.-J.Luo G.-L.Huang S.-C.Huang M.-J.2019-06-182019-06-182008218979https://www.scopus.com/inward/record.uri?eid=2-s2.0-58149259988&doi=10.1063%2f1.3032602&partnerID=40&md5=2fc25f166de8bbd7a6625083d1d69131https://scholars.lib.ntu.edu.tw/handle/123456789/411158Thermal conductivity of Si/SiGe superlattice filmsjournal article10.1063/1.30326022-s2.0-58149259988