The affinity of Si–N and Si–C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

C. W. ChenC. C. HuangY. Y. LinL. C. ChenK. H. Chen2020-06-202020-06-20200509259635https://scholars.lib.ntu.edu.tw/handle/123456789/503971The affinity of Si–N and Si–C bonding in amorphous silicon carbon nitride (a-SiCN) thin filmjournal articlehttps://doi.org/10.1016/j.diamond.2004.10.045