Development and characterization of a combinative technique for improving the polishing performance of diamond microarray dresser

Shih, C.-J.C.-J.ShihYeh, C.-H.C.-H.YehLin, C.-S.C.-S.LinPan, Y.-N.Y.-N.PanCHAO-SUNG LIN2020-05-122020-05-122012https://scholars.lib.ntu.edu.tw/handle/123456789/491039Development and characterization of a combinative technique for improving the polishing performance of diamond microarray dresserjournal article10.1016/j.diamond.2012.08.0042-s2.0-84865963560https://www.scopus.com/inward/record.uri?eid=2-s2.0-84865963560&doi=10.1016%2fj.diamond.2012.08.004&partnerID=40&md5=f7611111f8889075c8f91b8f2de7feb8