Fabrication of m-axial InGaN nanocolumn arrays on silicon substrates using triethylgallium precursor chemical vapor deposition approach

Liu, C.-M.C.-M.LiuTai, Y.Y.TaiChen, K.-H.K.-H.ChenChen, L.-C.L.-C.Chen2020-06-182020-06-18201401694332https://scholars.lib.ntu.edu.tw/handle/123456789/503242[SDGs]SDG9Fabrication of m-axial InGaN nanocolumn arrays on silicon substrates using triethylgallium precursor chemical vapor deposition approachjournal article10.1016/j.apsusc.2014.01.191