Chen, Ting-YiTing-YiChenBasu, NilabhNilabhBasuChang, Cheng-YangCheng-YangChangTseng, Sheng-HsiangSheng-HsiangTsengWEI-CHANG LI2026-01-082026-01-08202507413106https://www.scopus.com/record/display.uri?eid=2-s2.0-105022204031&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/735164Hardware true random number generators (TRNGs) based on chaotic MEMS oscillators often face practical limitations, including operational hysteresis, high driving voltages, and a heavy reliance on statistical post-processing to ensure randomness. This work overcomes these challenges by demonstrating a TRNG that uses amplitude modulation (AM) to induce chaotic internal resonance (IR) in a ScAlN piezoelectric oscillator. The AM-driven dynamics transform the oscillator's periodic beating into a robust, aperiodic waveform, providing a direct source of high-quality physical entropy. Without any statistical post-processing, the resulting 1.512-Mbit bitstream at a bit rate of 540-kbps passes all NIST 800-22 and 800-90B independent and identically distributed (IID) tests. The bitstream also shows a non-IID min-entropy of 0.843885 and an autocorrelation function (ACF) value of ±0.00159 within the 95% confidence interval (CI), confirming the AM-driven IR oscillator as a simple, area-efficient, and robust pathway for on-chip cryptographic hardware.falseamplitude modulationchaotic internal resonanceNonlinear oscillatortrue random number generatorjournal article10.1109/LED.2025.36333112-s2.0-105022204031