Silicon-based high-frequency multiple-fourier horn ultrasonic nozzles for atomization and pumping

Tsai, C.S.C.S.TsaiSong, Y.L.Y.L.SongTsai, S.C.S.C.TsaiChou, Y.F.Y.F.ChouCheng, J.H.J.H.ChengJUNG-HO CHENG2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-33847328045&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/314920[SDGs]SDG7Silicon-based high-frequency multiple-fourier horn ultrasonic nozzles for atomization and pumpingconference paper10.1109/ICSENS.2005.1597883