Integration of scheduling and advanced process control in semiconductor manufacturing: Review and outlook

Yugma, C.C.YugmaBlue, J.J.BlueDauzere-P?r?s, S.S.Dauzere-P?r?sVialletelle, P.P.VialletelleJAKEY BLUE2020-03-022020-03-022014https://scholars.lib.ntu.edu.tw/handle/123456789/467310[SDGs]SDG9Integration of scheduling and advanced process control in semiconductor manufacturing: Review and outlookconference paper10.1109/CoASE.2014.68993102-s2.0-84939797052https://www.scopus.com/inward/record.uri?eid=2-s2.0-84939797052&doi=10.1109%2fCoASE.2014.6899310&partnerID=40&md5=7e3e1e1e368ac3a8c60fc56f5bb21bdb