Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision Sidewall Structure

Huang-Chih ChenSheng-An LeeKuan-Wei HuangSheng-Wei PengLi-Chen Fu2024-10-182024-10-182024https://scholars.lib.ntu.edu.tw/handle/123456789/722191[SDGs]SDG7Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision Sidewall Structurejournal article10.1109/tim.2024.3461789