Formation of silicon surface gratings with high-pulse-energy ultraviolet laser

Chen, C.-Y.C.-Y.ChenMa, K.-J.K.-J.MaLin, Y.-S.Y.-S.LinLiu, C.-W.C.-W.LiuHsu, C.-W.C.-W.HsuChao, C.-Y.C.-Y.ChaoGurtler, S.S.GurtlerCHEE-WEE LIUCHIH-CHUNG YANG2020-06-292020-06-292000https://scholars.lib.ntu.edu.tw/handle/123456789/506103Formation of silicon surface gratings with high-pulse-energy ultraviolet laserjournal article10.1063/1.13090382-s2.0-0012798403https://www.scopus.com/inward/record.uri?eid=2-s2.0-0012798403&doi=10.1063%2f1.1309038&partnerID=40&md5=33b75017f4e12354dc93da82f88b1ab6