Growth and characterization of GaN films on (0001) sapphire substrates by alternate supply of trimethylgallium and NH <inf>3</inf>

Wang, H.Y.H.Y.WangYANG-FANG CHEN et al.2019-12-272019-12-271995https://scholars.lib.ntu.edu.tw/handle/123456789/443072Growth and characterization of GaN films on (0001) sapphire substrates by alternate supply of trimethylgallium and NH <inf>3</inf>journal article10.1016/S0921-5107(98)00429-22-s2.0-0001527454https://www.scopus.com/inward/record.uri?eid=2-s2.0-0001527454&doi=10.1016%2fS0921-5107%2898%2900429-2&partnerID=40&md5=fba031a8c94d675b6fb493e721a2b37e